Micro and Nanotechnology

The Micro and Nanotechnologies Department develops processes for fabrication of micro and nano devices for studies in condensed matter physics. It is composed of three engineer and an assistant engineer.

The top/down fabrication techniques used are thin film deposition, optical and electronic lithography, and etching.

The department manages the laboratory platform dedicated to these technologies and labelled by the CNRS.

Members of the department :

  • Antoine Boury Engineer
  • Sylvie Gautier Assistant engineer
  • ZhiZhong Li Research engineer
  • Raphaël Weil Research engineer